Veröffentlicht am in "Business, Business", Sprache — English. 7 Seiten.
Sputter coating in scanning electron microscopy is a sputter deposition process to cover a specimen with a thin layer of conducting material, typically a metal, such as a gold/palladium (Au/Pd) alloy. A conductive coating is needed to prevent charging of a specimen with an electron beam in conventional SEM mode (high vacuum, high voltage). Mehr anzeigen
