CMP slurries consist of abrasive materials dispersed in water and blended with other chemicals. The Copper CMP slurry is also a similar formulation. It is used in manufacturing semiconductors where it plays a significant role in the development of integrated circuits by preparing the wafer for photolithography steps. The surface of a slurry-processed wafer is very smooth. This is a critical requirement for etching precise lithography patterns on it. The importance of using highly effective slurr 更多
